Effect of hydrocarbon gas on the properties of magnetron sputtering of amorphous SiC:H
- 1 March 1989
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 108 (2) , 211-215
- https://doi.org/10.1016/0022-3093(89)90586-3
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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