An experimental study of a parallel-plate radio-frequency discharge: Measurements of the radiation temperature and electron density
- 1 April 1988
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 63 (7) , 2226-2236
- https://doi.org/10.1063/1.341060
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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