Quantitative determination of high-temperature oxygen microprecipitates in Czochralski silicon by micro-Fourier transform infrared spectroscopy
- 13 May 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (19) , 2099-2101
- https://doi.org/10.1063/1.104999
Abstract
No abstract availableKeywords
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