Laminated high-aspect-ratio microstructures in a conventional CMOS process

This publication has 9 references indexed in Scilit:

• A Piezoresistive Silicon Accelerometer With Monolithically Integrated CMOS-circuitry
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• Influence Of Design Geometry And Packaging On The Response Of Thermal Cmos Flow Sensors
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• A Piezoelectric pseudo-static Actuator For Large Displacement Under AC Voltage Operation
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• The Black Silicon Method V: A Study Of The Fabricating Of Movable Structures For Micro Electromechanical Systems
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• 3D structures with piezoresistive sensors in standard CMOS
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• Thermally and electrically isolated single crystal silicon structures in CMOS technology
  IEEE Electron Device Letters, 1994
• A wafer scale visual-to-thermal converter
  IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1993
• Electrostatic-comb drive of lateral polysilicon resonators
  Sensors and Actuators A: Physical, 1990
• A new approach for the fabrication of micromechanical structures
  Sensors and Actuators, 1989