X-ray residual stress measurement in TiN, ZrN and HfN films using the Seemann-Bohlin method
- 17 September 2002
- journal article
- Published by Elsevier
- Vol. 214 (2) , 169-174
- https://doi.org/10.1016/0040-6090(92)90766-5
Abstract
No abstract availableKeywords
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