On the formation of molybdenum silicides in MoSi multilayers: the effect of Mo thickness and annealing temperature
- 1 February 1992
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 55 (2-3) , 165-171
- https://doi.org/10.1016/0169-4332(92)90106-8
Abstract
No abstract availableKeywords
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