Spectroscopic ellipsometry in the infrared range
- 1 February 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 313-314, 625-630
- https://doi.org/10.1016/s0040-6090(97)00968-1
Abstract
No abstract availableKeywords
This publication has 21 references indexed in Scilit:
- In situ infrared ellipsometry study of the growth of hydrogenated amorphous carbon thin filmsThin Solid Films, 1998
- Calibration improvement of Fourier transform infrared phase-modulated ellipsometryJournal of the Optical Society of America A, 1996
- Improvements of Fourier transform phase-modulated ellipsometryReview of Scientific Instruments, 1995
- Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part I: Tetrahedrally Bonded MaterialsPublished by Elsevier ,1994
- Spectroscopic IR ellipsometry with imperfect componentsThin Solid Films, 1993
- Phase-modulated ellipsometer using a Fourier transform infrared spectrometer for real time applicationsReview of Scientific Instruments, 1993
- Phase modulated ellipsometry from the ultraviolet to the infrared: In situ application to the growth of semiconductorsProgress in Crystal Growth and Characterization of Materials, 1993
- Infrared phase-modulated ellipsometer for in-situ characterization of surfaces and thin filmsPublished by SPIE-Intl Soc Optical Eng ,1992
- Infrared ellipsometer for the study of surfaces, thin films, and superlatticesApplied Optics, 1992
- Infrared spectroscopic ellipsometry using a Fourier transform infrared spectrometer: Some applications in thin-film characterizationReview of Scientific Instruments, 1989