Large area ion and plasma beam sources
- 1 June 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 113 (1-4) , 8-15
- https://doi.org/10.1016/0168-583x(95)01359-8
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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