Laser-Induced Etching of Mn-Zn Ferrite an Its Application
- 1 October 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (10R)
- https://doi.org/10.1143/jjap.28.2151
Abstract
Single-crystalline ferrite was masklessly etched by focused Ar+ laser irradiation in CCl4 gas and in H3PO4 solution. Etching rates up to 68 µm/s in CCl4 and 340 µm/s in H3PO4 have been achieved by laser processes. Bending of the etched narrow groove was observed in CCl4 gas due to the enhanced reflection caused by the polarization of the laser beam when focused by a microscope objective lens. A vertical slab structure with a high aspect ratio of up to 40 has been obtained by the light-guiding effect of the laser beam in wet-chemical etching. RBS analysis of the processed surface revealed that laser-induced damage was much lower than that induced by mechanical polishing.Keywords
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