Evolution and Performance of the Nova NV-ID Predep™ Implanter
- 1 January 1982
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- A high-throughput mechanically scanned target chamberNuclear Instruments and Methods in Physics Research, 1981
- Dosimetry measurement in ion implantersNuclear Instruments and Methods in Physics Research, 1981
- Target chambers for ion implantation using mechanical scanningNuclear Instruments and Methods in Physics Research, 1981
- Diagnostic test for ion implantation dosimetryJournal of Vacuum Science and Technology, 1979
- Sample contamination caused by sputtering during ion implantationVacuum, 1979
- Activation analytical investigation of contamination and cross-contamination in ion implantationJournal of Electronic Materials, 1978
- Resistivity of Bulk Silicon and of Diffused Layers in SiliconBell System Technical Journal, 1962