Effects of Rapid Thermal Annealing on W/Si1−xGex Contacts
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Reduction of the Barrier Height of Silicide/p-Si1-xGex Contact for Application in an Infrared Image SensorJapanese Journal of Applied Physics, 1989