Micromachining of (hhl) silicon structures: experiments and 3D simulation of etched shapes
- 1 May 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 60 (1-3) , 168-175
- https://doi.org/10.1016/s0924-4247(96)01418-5
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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