Effect of Nitridation Rate on the Composition and Conductivity of Titanium Nitride Films Prepared from Sol–Gel Titania
- 1 November 1991
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 74 (11) , 2937-2940
- https://doi.org/10.1111/j.1151-2916.1991.tb06869.x
Abstract
No abstract availableKeywords
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