Preparation of Y-Ba-Cu-O Thin Films by the CVD Method in a Vacuum-Evaporation-Type Reactor

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Abstract
Y-Ba-Cu-O thin films were prepared on MgO(100) substrates by the CVD method using a vacuum-evaporation-type apparatus of compact size. Effects of the substrate temperature on the composition, electrical properties and crystallinity of the films were investigated. The composition ratio Ba/Y was virtually unaffected by the substrate temperature, while the ratio Cu/Y slightly decreased with increasing substrate temperature. The superconducting transition temperature and crystallinity were improved by increasing the substrate temperature. The film prepared at 740°C showed transition temperatures T con=89 K and T czero=57 K.
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