Preparation of cubic boron nitride films by use of electrically conductive boron carbide targets
- 1 February 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 257 (1) , 40-45
- https://doi.org/10.1016/0040-6090(94)06341-9
Abstract
No abstract availableKeywords
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