Force Microscopy Using Common-Path Optical-Heterodyne Interferometer
- 1 March 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (3R) , 587-590
- https://doi.org/10.1143/jjap.30.587
Abstract
This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using a Wollaston prism, which reduces the effects of mechanical vibrations and perturbation of the optical path length. In this paper, we proposed the optical system, constructed a system and measured the surface profile of optical disk grooves.Keywords
This publication has 11 references indexed in Scilit:
- Improved fiber-optic interferometer for atomic force microscopyApplied Physics Letters, 1989
- A differential interferometer for force microscopyReview of Scientific Instruments, 1989
- An atomic-resolution atomic-force microscope implemented using an optical leverJournal of Applied Physics, 1989
- Force microscope using a fiber-optic displacement sensorReview of Scientific Instruments, 1988
- Novel optical approach to atomic force microscopyApplied Physics Letters, 1988
- Atomic force microscopy using optical interferometryJournal of Vacuum Science & Technology A, 1988
- Application of atomic force microscopy to magnetic materialsJournal of Vacuum Science & Technology A, 1988
- Atomic force microscope–force mapping and profiling on a sub 100-Å scaleJournal of Applied Physics, 1987
- Atomic Force MicroscopePhysical Review Letters, 1986
- Optical heterodyne profilometryApplied Optics, 1981