Characteristics of Schottky diodes on AlxIn1-xAs grown by MOCVD

Abstract
The effects of surface pretreatment and a variety of metallisation techniques on the characteristics of Schottky diodes fabricated on AlxIn1-xAs grown by low-pressure and atmospheric-pressure MOCVD have been investigated. Barrier heights have been determined from I-V, C-V and I-T measurements and have been found to be in good agreement. Barrier heights of about 0.69 eV were measured for Al0.48In0.52As using Pt as the Schottky barrier contact.