Si29nuclear magnetic resonance of amorphous hydrogenated silicon and amorphous microcrystalline mixed-phase hydrogenated silicon

${}_{}{}^{29}{}_{}{}^{}\mathrm{Si}$ nuclear magnetic resonance (NMR) spectra have been measured for amorphous hydrogenated silicon (a-Si:H) and amorphous microcrystalline mixed-phase hydrogenated silicon (μc-Si:H) using high-resolution solid-state NMR techniques; magic-angle sample spinning, dipolar decoupling, and cross polarization (CP). ${}_{}{}^1{}_{}{}^{}\mathrm{H}$ NMR spectra have been also measured. The peak position of the ${}_{}{}^{29}{}_{}{}^{}\mathrm{Si}$ signal observed with the CP technique correlates well with the line shape of ${}_{}{}^1{}_{}{}^{}\mathrm{H}$ NMR spectra, which has been ascribed to a chemical shift due to bonding configurations not only in the first coordination sphere but also in the second- and further-nearest coordination spheres. Origins of the ${}_{}{}^{29}{}_{}{}^{}\mathrm{Si}$ linewidth have also been discussed, the magnitude of each contribution being estimated. A narrow ${}_{}{}^{29}{}_{}{}^{}\mathrm{Si}$ signal can be obtained without the CP technique only in μc-Si:H, which demonstrates that there are regions where the silicon network is mobile. Based on the NMR results, microscopic models of the structures of a-Si:H and μc-Si:H are presented.