Characterization and implementation of self-aligned TiSi/sub 2/ in submicrometer CMOS technology
- 1 January 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 38 (1) , 88-94
- https://doi.org/10.1109/16.65740
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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