Contaminations and Impurities in DC Magnetron Sputtered WSix Films on SiO2
- 16 February 1995
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 147 (2) , 477-490
- https://doi.org/10.1002/pssa.2211470218
Abstract
No abstract availableKeywords
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