Algorithms for simulation of three-dimensional etching
- 1 May 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
- Vol. 13 (5) , 616-624
- https://doi.org/10.1109/43.277635
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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