Preparation and characterization of r.f.-sputtered multilayered TiNAu films
- 15 May 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 200 (2) , 341-352
- https://doi.org/10.1016/0040-6090(91)90206-d
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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- Effects of substrate temperature and substrate material on the structure of reactively sputtered TiN filmsThin Solid Films, 1984
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