Dependence of properties of hydrogenated microcrystalline and amorphous silicon films prepared by planar magnetron sputtering in inert gas
- 1 December 1984
- journal article
- research article
- Published by Springer Nature in Applied Physics A
- Vol. 35 (4) , 241-247
- https://doi.org/10.1007/bf00617174
Abstract
No abstract availableKeywords
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