Quantification of germanium and boron in heterostructures Si/Si1−xGex/Si by SIMS
- 1 February 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 294 (1-2) , 54-58
- https://doi.org/10.1016/s0040-6090(96)09330-3
Abstract
No abstract availableKeywords
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