Investigation of PA-CVD of TiN: Relations between process parameters, spectroscopic measurements and layer properties
- 8 October 1993
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 60 (1-3) , 385-388
- https://doi.org/10.1016/0257-8972(93)90118-8
Abstract
No abstract availableKeywords
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