Laser wet etching of diffraction gratings in GaAs for integrated optics
- 1 July 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 4 (7) , 726-729
- https://doi.org/10.1109/jlt.1986.1074832
Abstract
Submicrometer optical gratings with high-aspect ratios were produced inKeywords
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