Gradient residual stress induced elastic deformation of multilayer MEMS structures
- 1 February 2007
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 134 (1) , 177-185
- https://doi.org/10.1016/j.sna.2006.05.026
Abstract
No abstract availableThis publication has 34 references indexed in Scilit:
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