Surface nitridation of InP with A N2 plasma
- 1 January 1990
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 41-42, 443-446
- https://doi.org/10.1016/0169-4332(89)90100-1
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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