Selective amplification of self-resistively heated laser-direct-written tungsten lines
- 27 June 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (26) , 2230-2232
- https://doi.org/10.1063/1.99768
Abstract
Laser-direct-write pyrolytic deposition of tungsten at 514.5 nm, out of the WF6 /H2 reduction system, was carried out on Al2O3 substrates between sputtered-on gold contact pads. Heat, generated by pulsed current sent through the laser-induced microdeposit, is used to amplify the microstructure by a conventional, however well localized, chemical vapor deposition process. In addition to tungsten, other more volatile materials can be deposited for amplification.Keywords
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