Depth resolution for AES sputter profiles of GaAs/GaInAs strained superlattices
- 1 October 1993
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 72 (2) , 171-174
- https://doi.org/10.1016/0169-4332(93)90008-y
Abstract
No abstract availableKeywords
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