Surface energy as a function of self-bias voltage in oxygen plasma wafer bonding
- 1 May 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 82 (1-3) , 239-244
- https://doi.org/10.1016/s0924-4247(99)00338-6
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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