SIMS analysis, under caesium bombardment, of Si in GaAs/(Al, Ga) as superlattices: Detection limit and depth resolution
- 1 August 1988
- journal article
- Published by Wiley in Surface and Interface Analysis
- Vol. 11 (11) , 545-552
- https://doi.org/10.1002/sia.740111102
Abstract
No abstract availableKeywords
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