Influence of magnetic field configuration on the deposition conditions in an unbalanced magnetron system
- 1 March 1997
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 90 (1-2) , 143-149
- https://doi.org/10.1016/s0257-8972(96)03110-6
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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