A multigrid solver for fluid flow and mass transfer coupled with grey-body surface radiation for the numerical simulation of chemical vapor deposition processes
- 1 January 1995
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 146 (1-4) , 202-208
- https://doi.org/10.1016/0022-0248(94)00571-0
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Development of advanced mathematical models for numerical calculations of radiative heat transfer in metalorganic chemical vapour deposition reactorsJournal of Crystal Growth, 1995
- Modelling of growth in a 5 X 3 inch multiwafer metalorganic vapour phase epitaxy reactorJournal of Crystal Growth, 1994
- Numerical study of transport phenomena in MOCVD reactors using a finite volume multigrid solverJournal of Crystal Growth, 1992
- A study of 2- and 3-D transport phenomena in horizontal chemical vapor deposition reactorsChemical Engineering Science, 1991
- Detailed models of the MOVPE processJournal of Crystal Growth, 1991
- EFFECTS OF THERMAL RADIATION ON MOMENTUM, HEAT, AND MASS TRANSFER IN A HORIZONTAL CHEMICAL VAPOR DEPOSITION REACTORNumerical Heat Transfer, Part A: Applications, 1991
- Transport phenomena in vertical reactors for metalorganic vapor phase epitaxyJournal of Crystal Growth, 1990
- Flow and heat transfer in CVD reactors: Comparison of Raman temperature measurements and finite element model predictionsJournal of Crystal Growth, 1990
- Simulations of two-dimensional recirculating flow effects in horizontal MOVPEJournal of Crystal Growth, 1989
- Vertical versus horizontal reactor: An optical study of the gas phase in a MOCVD reactorJournal of Crystal Growth, 1986