Sputter deposition of thin tantalum layers and low temperature interactions between tantalum and SiO2 and tantalum and silicon
- 1 November 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 165 (1) , 227-236
- https://doi.org/10.1016/0040-6090(88)90693-1
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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