An inversion method for the complete characterization of transparent film-absorbing substrate systems using multiple angle ellipsometry
- 30 June 1992
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 35 (6) , 855-864
- https://doi.org/10.1016/0038-1101(92)90288-n
Abstract
No abstract availableKeywords
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