A Review of Dry Etching of GaN and Related Materials
- 1 January 2000
- journal article
- review article
- Published by Springer Nature in MRS Internet Journal of Nitride Semiconductor Research
- Vol. 5 (1)
- https://doi.org/10.1557/s1092578300000119
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Low energy electron-enhanced etching of GaAs(100) in a chlorine/hydrogen dc plasmaApplied Physics Letters, 1996
- High-Power High-Temperature Heterobipolar TransistorWith Gallium Nitride EmitterMRS Internet Journal of Nitride Semiconductor Research, 1996