Thermal actuation of a GaAs cantilever beam
- 23 May 2000
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 10 (2) , 293-298
- https://doi.org/10.1088/0960-1317/10/2/332
Abstract
The design and performance of a thermally-actuated GaAs cantilever beam are presented. To actuate the cantilever beam an integrated GaAs MESFET heater was used. A comprehensive cantilever thermal actuation performance is analysed by experiment and simulation. The thermally-actuated GaAs cantilever shows excellent linearity and a high electro-mechanical conversion efficiency (ΓE = 0.802 µm mW-1). The method of two-dimensional numerical modelling and simulation is proposed to study its thermal and thermo-mechanical properties. The measured and simulated thermo-mechanical and electro-mechanical conversion characteristics are compared, indicating the viability of the simulation method used for further micromechanical analysis.Keywords
This publication has 18 references indexed in Scilit:
- The improved performance of GaAs micromachined power sensor microsystemSensors and Actuators A: Physical, 1999
- Patterning of cantilevers for power sensor microsystemVacuum, 1998
- III–V micromachined devices for microsystemsMicroelectronics Journal, 1998
- Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS designMaterials Science and Engineering: B, 1998
- The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIEVacuum, 1996
- Collective fabrication of gallium-arsenide-based microsystemsPublished by SPIE-Intl Soc Optical Eng ,1996
- Monolithic GaAs MESFET power sensor microsystemElectronics Letters, 1995
- A piezoresistive GaAs pressure sensor with GaAs/AlGaAs membrane technologyJournal of Micromechanics and Microengineering, 1995
- A GaAs pressure sensor based on resonant tunnelling diodesJournal of Micromechanics and Microengineering, 1994
- Gallium arsenide as a mechanical materialJournal of Micromechanics and Microengineering, 1994