Maskless lithography
Top Cited Papers
Open Access
- 28 January 2005
- journal article
- Published by Elsevier in Materials Today
- Vol. 8 (2) , 26-33
- https://doi.org/10.1016/s1369-7021(05)00699-1
Abstract
No abstract availableKeywords
This publication has 26 references indexed in Scilit:
- Nanometer-level stitching in raster-scanning electron-beam lithography using spatial-phase lockingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003
- Nanometer-level repeatable metrology using the NanorulerJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003
- Distributed axis electron-beam system for lithography and inspection—preliminary experimental resultsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Method for reducing hyperbolic phase in interference lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001
- Optimization of a lithographic and ion beam etching process for nanostructuring magnetoresistive thin film stacksJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- New concept for high-throughput multielectron beam direct write systemJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Distributed, multiple variable shaped electron beam column for high throughput maskless lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Large-area achromatic interferometric lithography for 100 nm period gratings and gridsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- 30 nm resolution zero proximity lithography on high-Z substratesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992