Ellipsometry of rough silicon surfaces: comment on the 'roughness of heteroepitaxial silicon-on-sapphire'
- 1 July 1989
- journal article
- Published by IOP Publishing in Semiconductor Science and Technology
- Vol. 4 (7) , 574-578
- https://doi.org/10.1088/0268-1242/4/7/014
Abstract
No abstract availableKeywords
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