Ion Implantation and Rapid Thermal Annealing in Synergy for Shallow Junction Formation
- 16 November 1996
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 158 (1) , 117-136
- https://doi.org/10.1002/pssa.2211580115
Abstract
No abstract availableKeywords
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